Photodiodes fabricated in epitaxial PbTe by Sb+ion implantation
作者:
J. P. Donnelly,
H. Holloway,
期刊:
Applied Physics Letters
(AIP Available online 1973)
卷期:
Volume 23,
issue 12
页码: 682-683
ISSN:0003-6951
年代: 1973
DOI:10.1063/1.1654789
出版商: AIP
数据来源: AIP
摘要:
Photodiodes in thin films of epitaxial PbTe grown on BaF2have been fabricated using Sb+ion implantation to create ann‐type layer inp‐type films. At 77 °K, 15‐mil‐square diodes had typical zero‐bias resistances of 1 M&OHgr;. With the infrared radiation incident on then‐type implanted layer, peak detectivities at 5.3 &mgr;m of 4.5 &khgr; 1011cm Hz1/2/W were observed in reduced background. Quantum efficiencies were typically 55%. With the radiation incident on thep‐type side through the BaF2substrate, the detectivity was much more sharply peaked with the peak occurring at 5.5 &mgr;m. The peak detectivity and quantum efficiency values in this case were similar to those for incidence on then‐type implanted layer.
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