An empirical formula for angular dependence of sputtering yields
作者:
Y. Yamamura,
Shigeru Shindo,
期刊:
Radiation Effects
(Taylor Available online 1984)
卷期:
Volume 80,
issue 1-2
页码: 57-72
ISSN:0033-7579
年代: 1984
DOI:10.1080/00337578408222489
出版商: Taylor & Francis Group
数据来源: Taylor
摘要:
An analytic empirical formula for the angular dependence of light-ion sputtering and heavy-ion sputtering has been proposed. The present empirical formula has two adjustable parameters which are determined by the least-squares method. One of the two parameters corresponds to Sigmundf, and the other is the angle of incidence at the maximum yield. The present empirical formula is found to be very useful for preliminary descriptions of the angular dependence of sputtering yield.
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