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Precision Electron Beam Microfabrication

 

作者: F. S. Ozdemir,   W. E. Perkins,   R. Yim,   E. D. Wolf,  

 

期刊: Journal of Vacuum Science and Technology  （AIP Available online 1973）
卷期: Volume 10, issue 6  

页码: 1008-1011

 

ISSN:0022-5355

 

年代: 1973

 

DOI:10.1116/1.1318454

 

出版商: American Vacuum Society

 

数据来源: AIP

 

摘要:

A computer-controlled electron beam microfabrication system has been used to fabricate complex, high-frequency acoustic surface wave devices. System hardware and software, fabrication process, and results are described.

 

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